Evaluation of unsaturated fluorocarbons for dielectric Etch applications

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, February 2003.

Development of novel alternative chemistry processes for

Oxide etching with NF₃ hydrocarbon chemistries for global warming

Passivation of miniature microwave coplanar waveguides using a thin film fluoropolymer electret

Development of novel alternative chemistry processes for

PPT - PLASMA AIDED DIELECTRIC ETCHING PowerPoint Presentation, free download - ID:794674

Oxide etching with NF₃ hydrocarbon chemistries for global warming

The investigation of DARC etch back in DRAM capacitor oxide mask opening

Playing with sizes and shapes of colloidal particles via dry etching methods - ScienceDirect

PPT - PLASMA AIDED DIELECTRIC ETCHING PowerPoint Presentation, free download - ID:794674

Coatings, Free Full-Text

Etch rate a and steady-state fluorocarbon film thickness b as function

Non-CO 2 greenhouse gas separation using advanced porous materials - Chemical Society Reviews (RSC Publishing) DOI:10.1039/D3CS00285C

A comprehensive review of nanocellulose modification and applications in papermaking and packaging: Challenges, technical solutions, and perspectives :: BioResources